@article {45122,
	title = {New Deconvolution Technique to Improve the Depth Resolution in Secondary Ion Mass Spectrometry},
	journal = {Journal of nano-and electronic physics},
	number = {11, no. 2},
	year = {2019},
	pages = {02021-1-02021-5},
	publisher = {Сумський державний університет},
	isbn = {2077-6772},
	author = {Dahraoui, N and Boulakroune, M and Benatia, D}
}
