@proceedings {61780,
	title = {Effect of the silicon membrane flatness defect on the piezoresistive pressure sensor response},
	journal = {ICECS 2000. 7th IEEE International Conference on Electronics, Circuits and Systems (Cat. No. 00EX445)},
	volume = {2},
	year = {2000},
	month = {2000},
	pages = {853-856},
	publisher = {IEEE},
	isbn = {0-7803-6542-9},
	author = {Zohir Dibi and Boukabache, Ali and Pons, Patrick}
}
