@proceedings {61850,
	title = {Effect of the membrane flatness defect on the offset voltage of a silicon piezoresistive pressure sensor},
	journal = {10th IEEE International Conference on Electronics, Circuits and Systems, 2003. ICECS 2003. Proceedings of the 2003},
	volume = {2},
	year = {2003},
	month = {2003},
	pages = {902-905},
	publisher = {IEEE},
	isbn = {0-7803-8163-7},
	author = {Zohir Dibi and Boukabache, Ali and Pons, Patrick}
}
