@article {61860,
	title = {Boron diffusion into nitrogen doped silicon films for P+ polysilicon gate structures},
	journal = {Thin Solid FilmsThin Solid Films},
	volume = {434},
	year = {2003},
	month = {2003},
	pages = {152-156},
	isbn = {0040-6090},
	author = {Mansour, Farida and Mahamdi, Ramdane and Jalabert, Laurent and Temple-Boyer, Pierre}
}
