@proceedings {62137,
	title = {Effect of Nitrogen on Boron doped Polysilicon Thin Films Properties},
	journal = {2007 IEEE International Symposium on Industrial Electronics},
	year = {2007},
	month = {2007},
	pages = {1346-1349},
	publisher = {IEEE},
	isbn = {1-4244-0754-0},
	author = {Bouridah, Hachemi and Mansour, Farida and Mahamdi, Ramdane and Temple-Boyer, Pierre}
}
