@proceedings {67052,
	title = {Improvement of SIMS multilayer profile analysis},
	journal = {2012 6th International Conference on Sciences of Electronics, Technologies of Information and Telecommunications (SETIT)},
	year = {2012},
	month = {2012},
	pages = {716-720},
	publisher = {IEEE},
	isbn = {1-4673-1658-X},
	author = {Boulakroune, M{\textquoteright}hamed and Benatia, Djamel}
}
