@article {67648,
	title = {Boron diffusion and activation in polysilicon multilayer films for P+ MOS structure: Characterization and modeling},
	journal = {Microelectronics journalMicroelectronics Journal},
	volume = {40},
	year = {2009},
	month = {2009},
	pages = {1-4},
	isbn = {0026-2692},
	author = {Mahamdi, Ramdane and Saci, Laurent and Mansour, F and Temple-Boyer, Pierre and Scheid, E and Jalabert, Laurent}
}
