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	year = {2009},
	month = {2009},
	pages = {066503},
	isbn = {1347-4065},
	author = {Boulakroune, M{\textquoteright}hamed and Benatia, Djamel and Kezai, Tahar}
}
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	title = {New approach for improvement of secondary ion mass spectrometry profile analysis},
	journal = {Japanese Journal of applied physicsJapanese Journal of Applied Physics},
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	pages = {7441},
	isbn = {1347-4065},
	author = {Boulakroune, M{\textquoteright}hamed and El Oualkadi, Ahmed and Benatia, Djamel and Kezai, Tahar}
}
