Study of grains size distribution and electrical activity of heavily boron doped polysilicon thin films

Citation:

Bouridah H, Bouaziz F, Mansour F, Mahamdi R, Temple-Boyer P. Study of grains size distribution and electrical activity of heavily boron doped polysilicon thin films. Materials science in semiconductor processingMaterials Science in Semiconductor Processing. 2011;14 :261-265.

Date Published:

2011

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