Belkebir A, Aggoune M-S.
Modeling and Simulation of Inductively Coupled Plasma (ICP) Using COMSOL Multiphysics. Eighth International Conference On Advances in Computing, Electronics and Electrical Technology - CEET 2018. 2018.
Belkebir A, Aggoune MS.
Modeling and Simulation of Inductively Coupled Plasma (ICP). Eighth International Conference On Advances in Computing, Electronics and Electrical Technology - CEET 2018 [Internet]. 2018.
Publisher's VersionAbstract
The purpose of this paper is to present a simplified model of inductively coupled plasma (ICP). The study of the effect of parameters such as current and number of turns in the coil is simulated using Comsol Multiphysics 3.5 by applying the fluid dynamic models that are generally appropriate for the investigation of inductively coupled plasmas.